Three-dimensional imaging of CMOS image sensor pixel structures using ptychographic x-ray computed tomography in the tender x-ray regime

kai scientific is pleased to highlight this first paper of ptychographic x-ray computed tomography from Tohoku University using a CITIUS triple sensor detector at the NanoTerasu synchrotron in Sendai.

Appl. Phys. Lett. 127, 184102 (2025); doi: 10.1063/5.0297526